Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions

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dc.contributor.authorJasulaneca, Liga
dc.contributor.authorKosmaca, Jelena
dc.contributor.authorMeija, Raimonds
dc.contributor.authorAndzane, Jana
dc.contributor.authorErts, Donats
dc.date.accessioned2021-12-07T13:05:01Z
dc.date.available2021-12-07T13:05:01Z
dc.date.issued2018-01-25
dc.descriptionFunding Information: This work was supported by the Latvian Council of Science (project No. 549/2012) and the University of Latvia project No. AAP2016/B043 and No. ZD2010/AZ19. Publisher Copyright: © 2018 Jasulaneca et al.; licensee Beilstein-Institut. License and terms: see end of document.
dc.description.abstractThis review summarizes relevant research in the field of electrostatically actuated nanobeam-based nanoelectromechanical (NEM) switches. The main switch architectures and structural elements are briefly described and compared. Investigation methods that allow for exploring coupled electromechanical interactions as well as studies of mechanically or electrically induced effects are covered. An examination of the complex nanocontact behaviour during various stages of the switching cycle is provided. The choice of the switching element and the electrode is addressed from the materials perspective, detailing the benefits and drawbacks for each. An overview of experimentally demonstrated NEM switching devices is provided, and together with their operational parameters, the reliability issues and impact of the operating environment are discussed. Finally, the most common NEM switch failure modes and the physical mechanisms behind them are reviewed and solutions proposed.en
dc.description.statusPeer reviewed
dc.format.extent30
dc.format.extent12128047
dc.identifier.citationJasulaneca, L, Kosmaca, J, Meija, R, Andzane, J & Erts, D 2018, 'Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions', Beilstein Journal of Nanotechnology, vol. 9, no. 1, pp. 271-300. https://doi.org/10.3762/bjnano.9.29
dc.identifier.doi10.3762/bjnano.9.29
dc.identifier.issn2190-4286
dc.identifier.urihttps://dspace.rsu.lv/jspui/handle/123456789/6986
dc.identifier.urlhttp://www.scopus.com/inward/record.url?scp=85041175146&partnerID=8YFLogxK
dc.language.isoeng
dc.relation.ispartofBeilstein Journal of Nanotechnology
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subjectNanocontacts
dc.subjectNanoelectromechanical switches
dc.subjectNanowires
dc.subjectNEM
dc.subjectReliability
dc.subject1.3 Physical sciences
dc.subject2.5 Materials engineering
dc.subject2.10 Nano-technology
dc.subject1.1. Scientific article indexed in Web of Science and/or Scopus database
dc.subjectGeneral Materials Science
dc.subjectGeneral Physics and Astronomy
dc.subjectElectrical and Electronic Engineering
dc.titleReview: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditionsen
dc.type/dk/atira/pure/researchoutput/researchoutputtypes/contributiontojournal/systematicreview

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