Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches
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Date
2021-01
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Abstract
Electrostatically actuated nanoelectromechanical (NEM) switches hold promise for operation with sharply defined ON/OFF states, high ON/OFF current ratio, low OFF state power consumption, and a compact design. The present challenge for the development of nanoelectromechanical system (NEMS) technology is fabrication of single nanowire based NEM switches. In this work, we demonstrate the first application of CuO nanowires as NEM switch active elements. We develop bottom-up and top-down approaches for NEM switch fabrication, such as CuO nanowire synthesis, lithography, etching, dielectrophoretic alignment of nanowires on electrodes, and nanomanipulations for building devices that are suitable for scalable production. Theoretical modelling finds the device geometry that is necessary for volatile switching. The modelling results are validated by constructing gateless double-clamped and single-clamped devices on-chip that show robust and repeatable switching. The proposed design and fabrication route enable the scalable integration of bottom-up synthesized nanowires in NEMS.
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Funding Information: This research was funded by the European Regional Development Fund (project no. 1.1.1.1/16/A/256, ?Creation of nanoelectromechanical switches?). Publisher Copyright: © 2021 by the authors. Licensee MDPI, Basel, Switzerland.
Keywords
Bottom-up, CuO, Nanoelectromechanical switch, Nanowires, NEMS, 1.4 Chemical sciences, 2.4 Chemical engineering, 2.10 Nano-technology, 1.1. Scientific article indexed in Web of Science and/or Scopus database, General Chemical Engineering, General Materials Science
Citation
Jasulaneca, L, Livshits, A I, Meija, R, Kosmaca, J, Sondors, R, Ramma, M M, Jevdokimovs, D, Prikulis, J & Erts, D 2021, 'Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches', Nanomaterials , vol. 11, no. 1, 117, pp. 1-14. https://doi.org/10.3390/nano11010117